An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator □ coated with a porous ZnO film

Optics Express

Volumn 18, Issue 11, 2010, Pages 11859-11866

  Yebo, Nebiyu A ^a   Lommens, Petra ^a   Hens, Zeger ^a   Baets, Roei ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; ETHANOL; GAS ADSORPTION; METALLIC FILMS; NANOPARTICLES; OPTICAL RESONATORS; POROUS SILICON; REFRACTIVE INDEX; SENSORS; SUSPENSIONS (FLUIDS); VAPORS; ZINC OXIDE;

COLLOIDAL SUSPENSIONS; DETECTION LIMITS; ETHANOL VAPOR; ETHANOL VAPOR SENSORS; EVANESCENT FIELDS; LARGE SURFACE AREA; LOW COSTS; LOW POWER; LOW-COST DEVICES; MICRORING RESONANCE; MICRORING RESONATOR; OPTICAL GAS SENSING; OPTICAL STRUCTURES; POROUS NATURE; REFRACTIVE INDEX CHANGES; RING RESONATOR; ROOM TEMPERATURE; SENSING CONFIGURATION; SILICON ON INSULATOR; VAPOR ADSORPTION; ZNO; ZNO FILMS; ZNO NANOPARTICLE FILMS; ZNO NANOPARTICLES;

SILICON ON INSULATOR TECHNOLOGY;

ALCOHOL; ZINC OXIDE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; GAS; INSTRUMENTATION; POROSITY; REFRACTOMETRY; SURFACE PLASMON RESONANCE; SYSTEM ANALYSIS; TRANSDUCER;

ETHANOL; GASES; MEMBRANES, ARTIFICIAL; POROSITY; REFRACTOMETRY; SURFACE PLASMON RESONANCE; SYSTEMS INTEGRATION; TRANSDUCERS; ZINC OXIDE;

EID: 77952808754     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.011859     Document Type: Article

References (24)

1. A. Airoudj, D. Debarnot, B. Bêche, and F. Poncin-Epailiard, "Design and sensing properties of an integrated optical gas sensor based on a multilayer structure," Anal. Chem. 80(23), 9188-9194 (2008).
2. M. El-Sherif, L. Bansal, and J. Yuan, "Fiber optic sensors for detection of toxic and biological threats," Sensors 7(12), 3100-3118 (2007).
3. B. Timmer, W. Olthuis, and A. Berg, "Ammonia sensors and their applications- a review," Sens. Actuators B Chem. 107(2), 666-677 (2005).
4. I. Syhan, A. Helwig, T. Becker, G. Muller, I. Elini, S. Zampolli, M. Padilla, and S. M. Marco, "Discontinuously operated metal oxide gas sensors for flexible tag microlab applications," IEEE Sens. J. 8(2), 176-181 (2008).
5. S. M. Kanan, O. M. El-Kadri, I. A. Abu-Yousef, and M. C Kanan, "Semiconducting metal, oxide based sensors for selective gas pollutant detection," Sensors 9(10), 8158-8196 (2009).
6. X. L. Cheng, H. Zhao, L. H. Huo, S. Gao, and J. G. Zhao, "ZnO nanoparticulate thin film: preparation, characterization and gas-sensing properties," Sens. Actuators 102(2), 248-252 (2004).
7. A. Forleo, L. Francioso, S. Capone, P. Siciliano, P. Lommens, and Z. Hens, "Synthesis and gas sensing properties of ZnO quantum dots," Sens. Actuators B Chem. 146(1), 111-115 (2010).
8. P. Dumon, W. Boagerts, A. Tchelnokov, J.-M. Fedili, and R. Baets, "Silicon nanophotonics," Future Fab. International. 25, 29-36 (2008).
9. N. Jokerst, M. Royal, S. Palit, L. Luan, S. Dhar, and T. Tyler, "Chip scale integrated microresonator sensing systems," J Biophotonics 2(4), 212-226 (2009).
10. Y. Sun, and X. Fan, "Analysis of ring resonators for chemical vapor sensor development," Opt. Express 16(14), 10254-10268 (2008).
11. N. Yebo, D. Taillaert, J. Roeis, D. Lahem, M. Debliquy, D. van Thourhout, and R. Baets, "Silicon-on-insulator (SOI) ring resonator based integrated optical hydrogen sensor," IEEE Photon. Technol. Lett. 21(14), 960-962 (2009).
12. A. Nitkowski, L. Chen, and M. Lipson, "Cavity-enhanced on-chip absorption spectroscopy using microring resonators," Opt. Express 16(16), 11930-11936 (2008).
13. J. T. Robinson, L. Chen, and M. Lipson, "On-chip gas detection in silicon optical microcavities," Opt. Express 16(6), 4296-4301 (2008).
14. T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and R. Bienstman, "Label-free biosensing with a slot waveguide-based ring resonator in silicon on insulator," IEEE Photonics J. 1(3), 197-204 (2009).
15. F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O'Faolain, F. Dong, J. M. Fedeli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, "High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode," Opt. Express 17(24), 21986-21991 (2009).
16. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Tailiaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
17. B. J. Melde, B. J. Johnson, and P. T. Charles, "Mesoporous silicate materials in sensing," Sensors 8(8), 5202-5228 (2008).
18. J. Kobler, and T. Bein, "Porous thin films of functionalized mesoporous silica nanoparticles," ACS Nano 2(11), 2324-2330 (2008).
19. M. R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin, and F. N. Dultsev, "Determination of pore size distribution in thin films by ellipsometric porosimetry," J. Vac. Sci. Technol. B 18(3), 1385-1391 (2000).
20. S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, and R. Baets, "Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193nin optical lithography," J. Lightwave Technol. 27(18), 4076-4083 (2009).
21. 2+-doped ZnO nanocrystals," J. Am. Chem. Soc. 125(43), 13205-13218 (2003).
22. P. Lommens, D. Van Thourhout, P. F. Smet, D. Poelman, and Z. Hens, "Electrophoretic deposition of ZnO nanoparticles: from micropatterns to substrate coverage," Nanotechnology 19(24), 24530.1 (2008).
23. Y. Wang, Z. Zhou, Z. Yang, X. Chen, D. Xu, and Y. Zhang, "Gas sensors based on deposited single-walled carbon nanotube networks for DMMP detection," Nanotechnology 20(34), 345502 (2009).
24. P. Atkins, and J. de Paula, Atkins, Physical. Chemistry 7th ed. (Oxford Univ. Press, 2002).