Light sensitive SiGe MEM resonator for detection and frequency tuning applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 691-694

  Stoffels, S ^a,b   Severi, S ^a   Vanhoof, R ^a   Mertens, R ^a,b   Puers, R ^b   Witvrouw, A ^a   Tilmans, H A C ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATED SENSORS; FINITE-ELEMENT APPROACH; FREQUENCY-TUNING; HEAT ABSORBERS; MEM RESONATOR; MICROBOLOMETER; NOVEL APPLICATIONS; RESISTANCE MEASUREMENT; RESONANT FREQUENCIES; RESONANT LIGHT; SILICON GERMANIUM; SILICON-BASED; STRUCTURAL LAYERS; TEMPERATURE INCREASE; THEORETICAL MODELS;

BOLOMETERS; FINITE ELEMENT METHOD; GERMANIUM; HEAT RESISTANCE; MECHANICAL ENGINEERING; MECHANICS; NATURAL FREQUENCIES; REACTIVE ION ETCHING; RESONATORS; SILICON ALLOYS;

SENSORS;

EID: 77952786960     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442314     Document Type: Conference Paper

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