Monolithic integration of carbon nanotubes based physical sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 55-58

  Lin, Chia Min ^a   Lin, Li Yuan ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GAUGE FACTORS; MECHANICAL DEFORMATION; MEMS (MICROELECTROMECHANICAL SYSTEMS); MONOLITHIC INTEGRATION; PHYSICAL SENSORS; PIEZORESISTIVE PRESSURE SENSORS; RESISTANCE CHANGE; SENSING ELEMENTS; SI WAFER; TEMPERATURE CHANGES; VERTICALLY ALIGNED;

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TEMPERATURE SENSORS;

CARBON NANOTUBES;

EID: 77952783864     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442566     Document Type: Conference Paper

References (9)

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