Parylene-C embedded CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly

2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006

Volumn 2, Issue , 2006, Pages 802-805

  Zhang, Maggie Q H ^a   Fung, Carmen K M ^a   Chow, Gary C T ^a   Li, Wen J ^a   Leong, Philip ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

CNTs; MEMS sensors; Microsensors; Nano sensors; Pressure sensors

Indexed keywords

CHARACTERIZATION; ELECTROPHORESIS; EMBEDDED SYSTEMS; MEMS; MICROSENSORS; NANOSENSORS;

ELECTROMECHANICAL MEASUREMENTS; INTEGRATED BUNDLED STRANDS; MEMS SENSORS;

PRESSURE SENSORS;

EID: 42549163291     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/nano.2006.247780     Document Type: Conference Paper

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