Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes

2005 5th IEEE Conference on Nanotechnology

Volumn 2, Issue , 2005, Pages 857-860

  Gau, C ^a   Chan, C L ^a   Shiau, S H ^a   Liu, C W ^b   Ting, S H ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Carbon nanotube; Molecular electronics; Nanosensor; Nanotechnology; Selective lateral growth; Semiconductor devices; Temperature sensor

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRODES; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; RAMAN SCATTERING; SEMICONDUCTOR DEVICES; SENSORS;

MOLECULAR ELECTRONICS; NANOSENSORS; SELECTIVE LATERAL GROWTH; TEMPERATURE SENSORS;

CARBON NANOTUBES;

EID: 33746893832     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2005.1500668     Document Type: Conference Paper

References (9)

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