Three dimensional surface-shape tactile imager with fingertip-size silicon integrated sensor-membran

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2186-2189

  Takao, Hidekuni ^a   Yawata, Masaki ^a   Sawada, Kazuaki ^a   Ishida, Makoto ^a   Okada, Hiroki ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

CMOS MEMS; Fingertip size; Integrated sensor; Surface shape imaging; Tactile sensor

Indexed keywords

CMOS COMPATIBLE; DEPTH RESOLUTION; HIGHLY SENSITIVE; INTEGRATED DEVICE; INTEGRATED SENSORS; MOVABLE DEVICES; SENSING AREAS; SILICON MEMBRANES; SOI WAFERS; STRAIN SENSORS; SURFACE SHAPE; TACTILE IMAGER; TACTILE SENSORS; THREE-DIMENSIONAL (3D) SURFACES; THREE-DIMENSIONAL SURFACE;

ACTUATORS; IMAGING SYSTEMS; MICROSYSTEMS; OPTOELECTRONIC DEVICES; PIEZOELECTRIC TRANSDUCERS; SILICON WAFERS; SOLID-STATE SENSORS;

THREE DIMENSIONAL;

EID: 71449096325     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285610     Document Type: Conference Paper

References (7)

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