Two-dimensional silicon smart tactile image-sensor with single sensing diaphragm actuated by vibrating pressure for simultaneous detection of force and object hardness distributions

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 602-605

  Takao, Hidekuni ^a   Yawata, Masaki ^a   Sawada, Kazuaki ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FORCE CONTROL; HAPTIC INTERFACES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

IMAGE-SENSORS; OBJECT HARDNESS DISTRIBUTIONS; SENSING DIAPHRAGM;

SILICON SENSORS;

EID: 33750133982     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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