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Volumn 48, Issue 4 PART 2, 2009, Pages

Effects of ion-bombardment-assist and high temperature on growth of zinc oxide films by microwave excited high density plasma enhanced metal organic chemical vapor deposition

(6) Asahara, Hirokazu a,b Inokuchi, Atsutoshi a,c Watanuki, Kohei a,d Hirayama, Masaki a Teramoto, Akinobu a Ohmi, Tadahiro a

a TOHOKU UNIVERSITY (Japan)

b ROHM CO LTD (Japan)

c TOKYO ELECTRON LTD (Japan)

d UBE INDUSTRIES LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-PLANE SAPPHIRE; CARBON AND HYDROGENS; CRYSTALLINITIES; ELECTRICAL PROPERTY; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HALL EFFECT MEASUREMENT; HIGH DENSITY PLASMAS; HIGH QUALITY; HIGH TEMPERATURE; IMPURITY CONCENTRATION; LOW TEMPERATURES; MOCVD; PLASMA ENHANCED METAL ORGANIC CHEMICAL VAPOR DEPOSITIONS; RADIO FREQUENCIES; ROCKING CURVES; ROOM TEMPERATURE; SELF-BIAS; XRD; ZNO; ZNO FILMS;

CARBON FILMS; CARRIER CONCENTRATION; CARRIER MOBILITY; ELECTRIC PROPERTIES; FIELD EMISSION; FIELD EMISSION MICROSCOPES; HALL EFFECT; INDUSTRIAL CHEMICALS; ION BOMBARDMENT; IONS; MAGNETIC FIELD EFFECTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROWAVES; OPTICAL EMISSION SPECTROSCOPY; OPTICAL PROPERTIES; ORGANIC CHEMICALS; ORGANOMETALLICS; PERMITTIVITY; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SURFACE CHEMISTRY; THERMAL DESORPTION; THERMAL DESORPTION SPECTROSCOPY; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 77952538347 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.04C135 Document Type: Article

Times cited : (4)

References (12)

1
- 29144523105
- T. Ohmi, M. Hirayama, and A. Teramoto: J. Phys. D 39 (2006) R1.
- (2006) J. Phys. , vol.D 39
- Ohmi, T.¹ Hirayama, M.² Teramoto, A.³

2
- 77952537239
- H. Tanaka, Z. Chuanjie, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi: Ext. Abstr. Int. Conf. Solid State Devices and Materials, 2002, p. 424.
- (2002) Ext. Abstr. Int. Conf. Solid State Devices and Materials , pp. 424
- Tanaka, H.¹ Chuanjie, Z.² Hirayama, M.³ Teramoto, A.⁴ Sugawa, S.⁵ Ohmi, T.⁶

3
- 0038686578
- H. Tanaka, Z. Chuanjie, Y. Hayakawa, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi: Jpn. J. Appl. Phys. 42 (2003) 1911.
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 1911
- Tanaka, H.¹ Chuanjie, Z.² Hayakawa, Y.³ Hirayama, M.⁴ Teramoto, A.⁵ Sugawa, S.⁶ Ohmi, T.⁷

4
- 19944421735
- A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, S. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma, and M. Kawasaki: Nat. Mater. 4 (2005) 42.
- (2005) Nat. Mater. , vol.4 , pp. 42
- Tsukazaki, A.¹ Ohtomo, A.² Onuma, T.³ Ohtani, M.⁴ Makino, T.⁵ Sumiya, M.⁶ Ohtani, K.⁷ Chichibu, S.⁸ Fuke, S.⁹ Segawa, Y.¹⁰ Ohno, H.¹¹ Koinuma, H.¹² Kawasaki, M.¹³

5
- 25144462707
- U. Ozgur, Ya. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Dogan, V. Avrutin, S. J. Cho, and H. Morkoc: J. Appl. Phys. 98 (2005) 041301.
- (2005) J. Appl. Phys. , vol.98 , pp. 041301
- Ozgur, U.¹ Ya. Alivov, I.² Liu, C.³ Teke, A.⁴ Reshchikov, M.A.⁵ Dogan, S.⁶ Avrutin, V.⁷ Cho, S.J.⁸ Morkoc, H.⁹

6
- 33646433759
- W. Z. Xu, Z. Z. Ye, Y. J. Zeng, L. P. Zhu, B. H. Zhao, L. Jiang, J. G. Lu, H. P. He, and S. B. Zhang: Appl. Phys. Lett. 88 (2006) 173506.
- (2006) Appl. Phys. Lett. , vol.88 , pp. 173506
- Xu, W.Z.¹ Ye, Z.Z.² Zeng, Y.J.³ Zhu, L.P.⁴ Zhao, B.H.⁵ Jiang, L.⁶ Lu, J.G.⁷ He, H.P.⁸ Zhang, S.B.⁹

7
- 0037291822
- K. Ogata, K. Maejima, Sz. Fujita, and Sg. Fujita: J. Cryst. Growth 248 (2003) 25.
- (2003) J. Cryst. Growth , vol.248 , pp. 25
- Ogata, K.¹ Maejima, K.² Fujita, Sz.³ Fujita, Sg.⁴

8
- 34748901142
- S. Heinze, A. Krtschil, J. Blasing, T. Hempel, P. Veit, A. Dadgar, J. Christen, and A. Krost: J. Cryst. Growth 308 (2007) 170.
- (2007) J. Cryst. Growth , vol.308 , pp. 170
- Heinze, S.¹ Krtschil, A.² Blasing, J.³ Hempel, T.⁴ Veit, P.⁵ Dadgar, A.⁶ Christen, J.⁷ Krost, A.⁸

9
- 54249114502
- H. Asahara, A. Inokuchi, K. Watanuki, M. Hirayama, A. Teramoto, and T. Ohmi: Jpn. J. Appl. Phys. 47 (2008) 2994.
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 2994
- Asahara, H.¹ Inokuchi, A.² Watanuki, K.³ Hirayama, M.⁴ Teramoto, A.⁵ Ohmi, T.⁶

10
- 77952728467
- M. Hirayama, T. Ohmi, T. Yamamoto, M. Ando, and N. Goto: American Vacuum Society 43rd Nat. Symp., Philadelphia, October 1996, p. 134.
- (1996) American Vacuum Society 43rd Nat. Symp. Philadelphia October , pp. 134
- Hirayama, M.¹ Ohmi, T.² Yamamoto, T.³ Ando, M.⁴ Goto, N.⁵

11
- 77952478211
- Dr. Thesis, Faculty of Engineering, Tohoku University, Sendai
- M. Hirayama: Dr. Thesis, Faculty of Engineering, Tohoku University, Sendai (1997).
- (1997)
- Hirayama, M.¹

12
- 0035556517
- F1.3.1
- T. Minami, S. Suzuki, and T. Miyata: Mater. Res. Soc. Symp. Proc. 666 (2001) F1.3.1.
- (2001) Mater. Res. Soc. Symp. Proc. , vol.666
- Minami, T.¹ Suzuki, S.² Miyata, T.³

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