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Volumn 48, Issue 4 PART 2, 2009, Pages
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Vanadium dioxide and vanadium sesquioxide thin films fabricated on (0001) or (1010)Al2O3 by reactive RF-magnetron sputter deposition and subsequent annealing processes
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING PROCESS;
ANNEALING TEMPERATURES;
CRITICAL TEMPERATURES;
LOW PRESSURES;
MAGNETRON SPUTTER DEPOSITION;
ONE-STEP ANNEALING;
REACTIVE RF MAGNETRON SPUTTER;
SINGLE-CRYSTALLINE;
SURFACE ORIENTATION;
TWO-STEP ANNEALING;
VANADIUM DIOXIDE;
VANADIUM SESQUI-OXIDE;
ALUMINUM;
FABRICATION;
GELS;
MAGNETRONS;
METAL INSULATOR BOUNDARIES;
METAL INSULATOR TRANSITION;
SEMICONDUCTOR INSULATOR BOUNDARIES;
THIN FILMS;
VANADIUM;
VANADIUM ALLOYS;
VANADIUM COMPOUNDS;
ANNEALING;
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EID: 77952513838
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.48.04C139 Document Type: Article |
Times cited : (10)
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References (12)
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