Experimental assessment of self-heating in SOI FinFETs

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2009, Pages

  Scholten, A J ^a   Smit, G D J ^a   Pijper, R M T ^a   Tiemeijer, L F ^a   Tuinhout, H P ^a   Van Der Steen, J L P J ^b   Mercha, A ^c   Braccioli, M ^d   Klaassen, D B M ^a  

^a NXP TSMC Research Centre   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c IMEC   (Belgium)

^d UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL ASSESSMENT; SELF-HEATING; SOI FINFETS; TEMPERATURE RISE; THERMAL IMPEDANCE;

ELECTRON DEVICES;

HEATING;

EID: 77952414188     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2009.5424362     Document Type: Conference Paper

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