Cantilever deflection measurement and actuation by an interdigitated transducer

Applied Physics Letters

Volumn 96, Issue 17, 2010, Pages

  Strambini, E ^a   Piazza, V ^a   Pingue, P ^a   Biasiol, G ^b   Sorba, L ^a   Beltram, F ^a  

^a ISTITUTO NANOSCIENZE CNR   (Italy)

^b LABORATORIO TASC   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER DEFLECTION; HIGH BANDWIDTH; INTER-DIGITATED TRANSDUCERS; MASS SENSING; OSCILLATION MODE; SUBSTRATE MATERIAL;

ATOMIC FORCE MICROSCOPY; CRYSTALLOGRAPHY; NANOCANTILEVERS; TRANSDUCERS;

ULTRASONIC TRANSDUCERS;

EID: 77952345761     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3407516     Document Type: Article

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