Fabrication of a stent-type thermal flow sensor for measuring nasal respiration

Journal of Micromechanics and Microengineering

Volumn 20, Issue 5, 2010, Pages

  Shikida, M ^a   Yokota, T ^a   Naito, J ^a   Sato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION FORCE; ETCHING PROCESS; FLOW DIRECTION; FLOW RANGES; FLOW-SENSORS; INNER SURFACES; MECHANICAL STRENGTH; MEDICAL TOOLS; MONOLITHICALLY INTEGRATED; OUTPUT FREQUENCY; RESPONSE TIME; SENSOR CHARACTERISTICS; THERMAL FLOW SENSOR; THERMAL ISOLATION; TI SUBSTRATES; WET-ETCHING PROCESS;

FABRICATION; MONOLITHIC INTEGRATED CIRCUITS; SENSORS; SILICONES; WET ETCHING;

OSCILLATING FLOW;

EID: 77951917130     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/5/055029     Document Type: Article

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