High-aspect-ratio tapered structures using an integrated lens technique

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 383-386

  Park, Jung Hwan ^a   Yoon, Yong Kyu ^b   Prausnitz, Mark R ^a   Allen, Mark G ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BIODEGRADATION; BLOOD; EPOXY RESINS; ETCHING; FLUIDIC DEVICES; MASKS; PHOTORESISTS; SKIN;

BIODEGRADABLE POLYMERS; MICROMOLDING; MICRONEEDLES; WET ETCHING;

MICROLENSES;

EID: 3042740961     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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