Research on glass wet etching for micro fluidic devices

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 39, Issue 11, 2003, Pages 123-129

  Xie, Haibo ^a   Fu, Xin ^a   Liu, Ling ^a   Yang, Huayong ^a   Xu, Dong ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Glass; MEMS; Microfluidic devices; Wet etching

Indexed keywords

ETCHING; FABRICATION; FLUIDIC DEVICES; GLASS; PUMPS;

CLEANING INTERVAL; ETCHING SOLUTIONS; ETCHING TEMPERATURE; MICROFLUIDIC DEVICES; MICROPUMPS; RABBLING MECHANISM; WET ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 2342438868     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/JME.2003.11.123     Document Type: Article

References (6)

1. Nakanishi H, Nishimoto T, Nakamura N, et al. Fabrication for electrophoresis devices on quartz and glass substrates using a bonding with hf solution. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), Nagoya, Japan, 1997: 299-304
2. McCreedy T. Rapid prototyping of glass and PDMS micro-structures for micro total analytical systems and micro chemical reactors by microfabrication in the general laboratory. Analytica Chimica Acta, 2001, 427: 39-43
3. Becker, Lowack H, Manz K A. Planar quartz chips with submicron channels for two-dimensional capillary electrophoresis application. Micromech Microeng, 1998, 8: 24-28