Piezocapacitive effect of a sandwich structure in a microfabricated cantilever

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 564-567

  Huang, Jian Qiu ^a   Huang, Qing An ^a   Qin, Ming ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM BENDING; DIELECTRIC CONSTANTS; FLOW RATE SENSORS; HEAVILY DOPED; MECHANICAL STRESS; MEMSDEVICES; MICROFABRICATED CANTILEVERS; SENSING ELEMENTS; SENSING TECHNOLOGY;

ATOMIC FORCE MICROSCOPY; MECHANICAL ENGINEERING; MICROFABRICATION; NANOCANTILEVERS; PERMITTIVITY; REACTIVE ION ETCHING; SANDWICH STRUCTURES;

STRESSES;

EID: 77951894059     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442441     Document Type: Conference Paper

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