Synthesis and characterization of templated si-based nanowires via vapor-liquid-solid (VLS) growth for electrical transport

INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Volumn , Issue , 2010, Pages 1140-1141

  Lee, Jae Ho ^a   Lund, Isaac N ^a   Eisenbraun, Eric T ^a   Xue, Yongqiang ^a   Geer, Robert E ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AS-GROWN; CONDUCTION CHANNEL; ELECTRICAL CHARACTERIZATION; ELECTRICAL CONDUCTIVITY; ELECTRICAL TRANSPORT; NANOWIRE SURFACE; NANOWIRE SYNTHESIS; ORDERS OF MAGNITUDE; POST-DEPOSITION; SELF-ASSEMBLED; SI NANOWIRE; SI WAFER; SI-BASED; SILICIDATION; SILICIDE FORMATION; SILICIDE NANOWIRES; SILICON NANOWIRES; SILICON SUBSTRATES; SYNTHESIS AND CHARACTERIZATION; TEM ANALYSIS; TEM-EDS; TEMPLATED; THERMAL PROCESSING; VAPOR-LIQUID-SOLID GROWTH; VLS GROWTH;

ELECTRIC CONDUCTIVITY; LIQUIDS; NANOELECTRONICS; NANOWIRES; SEMICONDUCTING SILICON COMPOUNDS; SILICIDES; SILICON WAFERS; SYNTHESIS (CHEMICAL); THERMAL EVAPORATION; VAPORS;

ELECTRIC WIRE;

EID: 77951656216     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/INEC.2010.5424988     Document Type: Conference Paper

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