Hollow ARROW waveguides on self-aligned pedestals for high-sensitivity optical sensing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7591, Issue , 2010, Pages

  Lunt, Evan J ^a   Phillips, Brian S ^a   Keeley, Jared M ^a   Hawkins, Aaron R ^a   Measor, Philip ^b   Wu, Bin ^b   Schmidt, Holger ^b  

^a Department of Electrical and Computer Engineering   (United States)

^b University of California   (United States)

Author keywords

Anisotropic etching; ARROW waveguides; Hollow waveguides; Integrated optics; Sensors

Indexed keywords

ANISOTROPIC PLASMA ETCHING; ANTIRESONANT REFLECTING OPTICAL WAVEGUIDES; ARROW WAVEGUIDES; ETCHING MASKS; GUIDE LIGHT; HIGH-SENSITIVITY; HOLLOW CORES; HOLLOW WAVEGUIDES; OPTICAL SENSING; PLANAR SUBSTRATE; PRE-ETCHING; REPRODUCIBILITIES; SELF ALIGNED PROCESS; SELF-ALIGNED; SENSING PLATFORMS; SILICON DIOXIDE; SILICON SUBSTRATES; SINGLE LAYER; SOLID WAVEGUIDES;

ANISOTROPIC ETCHING; ANISOTROPY; DESIGN; INTEGRATED OPTICS; LIGHT; OPTICAL MATERIALS; OPTICAL SYSTEMS; PHOTONICS; PLASMA ETCHING; SENSORS; SILICA; SUBSTRATES; WAVEGUIDES;

PHASE INTERFACES;

EID: 77951519452     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.841010     Document Type: Conference Paper

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