Mechanisms of AlInN growth by MOVPE: Modeling and experimental study

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 6, 2008, Pages 1688-1690

  Yakovlev, E V ^a   Lobanova, A V ^a   Talalaev, R A ^a,b   Watson, I M ^c   Lorenz, K ^d   Alves, E ^d  

^a SOFT IMPACT LTD   (Russian Federation)

^b Semiconductor Technology Research   (Germany)

^c UNIVERSITY OF STRATHCLYDE   (United Kingdom)

^d INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AIXTRON; CONTENT VARIATION; EXPERIMENTAL APPROACHES; EXPERIMENTAL DATA; EXPERIMENTAL STUDIES; INDIUM ATOMS; LAYER COMPOSITION; MOVPE; PROCESS PARAMETERS; SET-POINT TEMPERATURES; SINGLE WAFER;

NITRIDES; SEMICONDUCTOR GROWTH;

SILICON WAFERS;

EID: 77951251935     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200778588     Document Type: Conference Paper

References (11)

1. J. F. Carlin, C. Zellweger, J. Dorsaz, S. Nicolay, G. Christmann, E. Feltin, R. Butté, and N. Grandjean, phys. stat. sol. (b) 242, 2326 (2005).
2. A. Dadgar, F. Schulze, J. Bläsing, A. Diez, A. Krost, M. Neuburger, E. Kohn, I. Daumiller, and M. Kunze, Appl. Phys. Lett. 85, 5400 (2004).
3. C. Hums, J. Bläsing, A. Dadgar, A. Diez, T. Hempel, J. Christen, A. Krost, K. Lorenz, and E. Alves, Appl. Phys. Lett. 90, 022105 (2007).
4. T. Fujimori, H. Imai, A. Wakahara, H. Okada, A. Yoshida, T. Shibata, and M. Tanaka, J. Cryst. Growth 272, 381 (2004).
5. S. Herández, K. Wang, D. Amabile, E. Nogales, D. Pastor, R. Cuscó, D. Pastor, L. Artús, R.W. Martin, K. P. O'Donnell, I. M. Watson, and the RENiBEl network, MRS Symp. Proc. 831, FF23.4 (2005).
6. K. Lorenz, N. Franco, E. Alves, I. M. Watson, R. W. Martin, and K. P. O'Donnell, Phys. Rev. Lett. 97, 85501 (2006).
7. K. Lorenz, N. Franco, E. Alves, S. Pereira, I. M. Watson, R. W. Martin, and K. P. O'Donnell, submitted to J. Cryst. Growth.
8. E.V. Yakovlev, R. A. Talalaev, Yu. N. Makarov, B. S. Yavich, and W. N. Wang, J. Cryst. Growth 261, 182 (2003).
9. E. V. Yakovlev, R. A. Talalaev, R. W. Martin, C. Jeynes, N. Peng, C. J. Deatcher, and I. M. Watson, phys. stat. sol. (c) 3(6), 1620 (2006).
10. E. V. Yakovlev, R. A. Talalaev, N. Kaluza, H. Hardtdegen, and H. L. Bay, J. Cryst. Growth 298, 413 (2007).
11. M. Kariya, S. Nitta, S. Yamaguchi, H. Kato, T. Takeuchi, C. Wetzel, H. Amano, and I. Akasaki, Jpn. J. Appl. Phys. 37, L697 (1998).