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International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 860-865

Low hydrogen content hydrogenated amorphous carbon films using direct current glow discharge plasma CVD

(2) Malhotra, Manju a Kumar, Satyendra a

a INDIAN INSTITUTE OF TECHNOLOGY KANPUR (India)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DIAMOND; HYDROGEN;

CHEMICAL STRUCTURE; CONFERENCE PAPER; ELECTRIC CURRENT; ENERGY; FILM; GROWTH RATE; HYDROGENATION; METHODOLOGY; OPTICS; POLARIMETRY; REFRACTION INDEX; TECHNIQUE; VAPORIZATION;

EID: 0037139117 PISSN: 02179792 EISSN: None Source Type: Journal
DOI: 10.1142/s0217979202010518 Document Type: Conference Paper

Times cited : (1)

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