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Volumn , Issue , 2009, Pages 612-618
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Modelling stress in silicon with TSVs and its effect on mobility
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVE DEVICES;
COEFFICIENTS OF THERMAL EXPANSIONS;
ELECTRICAL CONNECTION;
ELECTRICAL INTERCONNECTS;
ELECTRICAL PERFORMANCE;
ELECTRONICS PRODUCTS;
FINITE ELEMENT MODELING;
INTERCONNECT CHIPS;
JOINT RELIABILITY;
SILICON SURFACES;
SILICON THICKNESS;
STACKING LAYERS;
TEMPERATURE LOADINGS;
THERMAL MISMATCH;
THERMAL STRAIN;
THROUGH-SILICON-VIA;
CHIP SCALE PACKAGES;
ELASTICITY;
ELECTRIC CONNECTORS;
STRAIN;
STRUCTURAL DESIGN;
THERMAL EXPANSION;
THERMAL STRESS;
SILICON WAFERS;
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EID: 77950930289
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/EPTC.2009.5416477 Document Type: Conference Paper |
Times cited : (16)
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References (7)
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