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Volumn 12, Issue 1, 2010, Pages 55-62
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Principle design and actuation of a dual chamber electromagnetic micropump with coaxial cantilever valves
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Author keywords
Active cantilever valve; Electromagnetic actuation; Micropump; Nozzle diffuser
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Indexed keywords
APPLIED CURRENT;
BACK PRESSURES;
CANTILEVER VALVES;
CONTROL FLUIDS;
CRITICAL DESIGN;
DIFFERENT FREQUENCY;
DRUG DELIVERY APPLICATIONS;
ELECTROMAGNETIC ACTUATION;
FAST RESPONSE;
FLUID FLOW;
FREQUENCY-DEPENDENT;
INTEGRAL PART;
INTERMEDIATE MEMBRANES;
LARGE DEFLECTION;
LOW COSTS;
MICRO FLUIDIC SYSTEM;
MICRO PUMP;
RESONANCE FREQUENCIES;
STRESS-STRAIN ANALYSIS;
VOLUME FABRICATION;
WATER FLOW RATE;
ATOMIC FORCE MICROSCOPY;
CONCEPTUAL DESIGN;
DRUG DELIVERY;
ELECTROMAGNETIC FIELDS;
ELECTROMAGNETS;
FINITE ELEMENT METHOD;
FLEXIBLE STRUCTURES;
FLOW OF FLUIDS;
NANOCANTILEVERS;
PROCESS ENGINEERING;
RELIABILITY ANALYSIS;
RESONANCE;
VALVES (MECHANICAL);
PUMPS;
ARTICLE;
ARTIFICIAL MEMBRANE;
CONTROLLED STUDY;
DRUG DELIVERY SYSTEM;
ELECTROMAGNETIC FIELD;
ELECTROMAGNETIC MICROPUMP;
FINITE ELEMENT ANALYSIS;
FLOW RATE;
FLUID FLOW;
GEOMETRY;
MEMBRANE STRUCTURE;
MICROELECTROMECHANICAL SYSTEM;
MICROFLUIDICS;
MICROTECHNOLOGY;
MOLECULAR DYNAMICS;
PRESSURE GRADIENT;
PRIORITY JOURNAL;
PROCESS DESIGN;
PROCESS OPTIMIZATION;
PUMP DESIGN;
RELIABILITY;
STRESS STRAIN RELATIONSHIP;
WATER FLOW;
COMPUTER-AIDED DESIGN;
EQUIPMENT DESIGN;
EQUIPMENT FAILURE ANALYSIS;
INFUSION PUMPS, IMPLANTABLE;
MAGNETICS;
MEMBRANES, ARTIFICIAL;
MICRO-ELECTRICAL-MECHANICAL SYSTEMS;
MICROFLUIDICS;
MINIATURIZATION;
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EID: 77950862571
PISSN: 13872176
EISSN: None
Source Type: Journal
DOI: 10.1007/s10544-009-9358-9 Document Type: Article |
Times cited : (18)
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References (19)
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