SrTiO3-based sensors for in situ monitoring of trace levels of oxygen

Journal of the Ceramic Society of Japan

Volumn 118, Issue 1376, 2010, Pages 300-304

  Hara, Toru ^a   Ishiguro, Takashi ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

Atomic layer deposition; Oxygen sensor; Pulsed laser deposition

Indexed keywords

ATOMIC LAYER DEPOSITION; DEPOSITION; OXYGEN; OXYGEN SENSORS; PULSED LASER DEPOSITION; PULSED LASERS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR LASERS; STRONTIUM ALLOYS; SURFACE DEFECTS; SURFACE SEGREGATION;

CLEAN SURFACES; HIGH-RESISTANCE STATE; IN- SITU MONITORING; OXYGEN CONCENTRATIONS; SEMICONDUCTIVE; SEMICONDUCTOR MANUFACTURING PROCESS; TRACE LEVEL;

STRONTIUM TITANATES;

EID: 77950845329     PISSN: 18820743     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj2.118.300     Document Type: Article

References (10)

1. T. Hara and T. Ishiguro, Sens. Actuators B Chem., 136, 489-493 (2009).
2. T. Hara, T. Ishiguro, N. Wakiya and K. Shinozaki, Jpn. J. Appl. Phys., 47, 7486-7489 (2008).
3. T. Hara, T. Ishiguro, N. Wakiya and K. Shinozaki, Mater. Sci. Eng. B, 161, 142-145 (2009).
4. A. Kosola, M. Putkonen, L.-S. Johansson and L. Niinistö, Appl. Surf. Sci., 211, 102-112 (2003).
5. H. Seim, H. Mölsä, M. Nieminen, H. Fjellvåg and L. Niinistö, J. Mater. Chem., 7, 449-455 (1997).
6. M. Nieminen, S. Lehto and L. Niinistö, J. Mater. Chem., 11, 3148-3153 (2001).
7. J. Päiväsaari, M. Putkonen and L. Niinistö, J. Mater. Chem., 12, 1828-1832 (2002).
8. Q.-H. Wu, M. Liu and W. Jaegermann, Mater. Lett., 59, 1980-1983 (2005).
9. B. Psiuk, J. Szade, H. Schroeder, H. Haselier, M. Mlynarczyk, R. Waser and K. Szot, Appl. Phys., A Mater. Sci. Process., 89, 451-455 (2007).
10. T. Ohnishi, K. Shibuya, M. Lippmaa, D. Kobayashi, H. Kumigashira, M. Ohshima and H. Koinuma, Appl. Phys. Lett., 85, 272-274 (2004).