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Volumn 1146, Issue , 2008, Pages 1-6
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In-situ electrical probing of zones of nanoindentation-induced phases of silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
NANOINDENTATION;
NANOTECHNOLOGY;
UNLOADING;
AMORPHOUS SILICON (A-SI);
CRYSTALLINE PHASIS;
HIGH PRESSURE;
HIGH-PRESSURE PHASE;
HIGH-PRESSURE PHASIS;
IN-SITU MEASUREMENT;
NANO SCALE;
AMORPHOUS SILICON;
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EID: 77950464407
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-1146-nn02-06 Document Type: Conference Paper |
Times cited : (2)
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References (14)
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