Data analysis technique of atomic force microscopy for atomically flat silicon surfaces

IEICE Transactions on Electronics

Volumn E92-C, Issue 5, 2009, Pages 664-670

  Konda, Masahiro ^a   Teramoto, Akinobu ^a   Suwa, Tomoyuki ^a   Kuroda, Rihito ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Atomic force microscopy; Keywords atomically flat silicon surfaces; Off angle

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; DATA HANDLING; INFORMATION ANALYSIS; MOSFET DEVICES; SEMICONDUCTING SILICON; SILICON;

ATOMIC TERRACES; CURRENT DRIVABILITY; DATA ANALYSIS TECHNIQUES; DIRECTION ANGLE; ELECTRICAL CHARACTERISTIC; MEASUREMENT DATA; OFF-ANGLE; SILICON SURFACES;

SILICON WAFERS;

EID: 77950381720     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1587/transele.E92.C.664     Document Type: Article

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