Design and characterization of NCD piezoresistive strain sensor

IEEE International Symposium on Industrial Electronics

Volumn , Issue , 2009, Pages 121-126

  Kulha, Pavel ^a   Boura, Adam ^a   Husak, Miroslav ^a   Kromka, Alexander ^b   Babchenko, Oleg ^b  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

3D STRUCTURES; APPLIED FORCES; BORON-DOPED; CONTACT EDGES; COVENTORWARE; FEM CALCULATION; GAUGE FACTORS; GEOMETRICAL DEFORMATION; HIGH-TEMPERATURE DEVICES; MECHANICAL AND ELECTRICAL PROPERTIES; MECHANICAL STRESS; MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS; NANOCRYSTALLINE DIAMOND LAYERS; NANOCRYSTALLINE DIAMONDS; NCD FILMS; PATTERNED GROWTH; PIEZO-RESISTIVE; PIEZORESISTIVE SENSING; PIEZORESISTOR; PROMISING MATERIALS; ROOM TEMPERATURE; STRAIN GAUGE; STRAIN SENSORS; TRANSMISSION LINE METHODS;

BORON; DIAMOND FILMS; DIAMONDS; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; FILM GROWTH; GAGES; INDUSTRIAL ELECTRONICS; MECHANICAL PROPERTIES; MICROWAVES; PLASMA DEPOSITION; SENSORS; SILICON COMPOUNDS; STRESSES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 77950170848     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISIE.2009.5222002     Document Type: Conference Paper

References (19)

1. Werner M. Gluche P. Adamschik M. Kohn E. Fecht H.-J. "Review on diamond based piezoresistive sensors", Industrial Electronics, 1998, 1:147-152
2. C.E. Nebel at al., "Diamond for bio-sensor applications", Journal of Physics D: Applied Physics, vol 40., 2007, pp. 6443-6466
3. Y. Boiko, P. Gonon, S. Prawer, D.N. Jamieson, "Piezoresistivity of boron doped CVD diamond films", Material Science and engineering, B46, 1997, pp. 112-114
4. O. Dorsch, K. Holzner, M. Werner, E. Obermeier, R. E. Harper, C. Johnston, et al., "Piezoresistive Effect of Boron-Doped Diamond Thin-Films", Diamond and Related Materials, vol. 2, 1993, pp. 1096-1099
5. M. Deguchi, N. Hase, M. Kitabatake, H. Kotera, S. Shima and H. Sakakima, "Piezoresistive properties of p-type CVD diamond films", Diamond Films and Technology, vol. 6, 1996, pp. 77-85,
6. A. Yamamoto, N. Norio, T.Takahiro, "Evaluation of diamond gauge factor up to 500°C", Diamond Relatated Materials, 2007, 16:1670-1675
7. J. Fraden, "Handbook of Modem Sensors (Physics, Design and Applications", American Institute of Physics, New York, 1995
8. A.Kromka, S. Potocky, J. Čermák, B. Rezek, J. Zemek, M. Vaněček, "Early stage of diamond growth at low temperature", Diamond Relat. Mater. 2008, 17:1252
9. W.Gajewski, P. Achatz, O.A. Williams, K. Haenen, E. Bustarret, M. Stutzmann, J.A. Garrido, "Electronic and optical properties of boron-doped nanocrystalline diamond films", Phys. Rev. B 79, 2009, 045206, doi: 10.1103. Phys. Rev. B. 79.045206
10. S. Bühlmann, E. Blank, R. Haubner, B. Lux, "Characterization of ballas diamond depositions" Diamond Relat. Mater. 1999, 8:194
11. S.L. Heidger, "Friction and wear of amorphous hydrogenated carbon", Mat. Res. Soc. Symp. Proc., 1995, 383:319
12. H. Kuzmany, R. Pfeiffer, N. Salk, B. Günther, "The mystery of the 1140 cm-1 Raman line in nanocrystalline diamond films", Carbon, 2004, 42:911
13. Ruan J., Choyke W. J., Parlow W. D., "Si impurity in chemical vapor deposited diamond films", Appl. Phys. Lett. 1991, 58:295
14. Clark C. D. Kanda H. Kiflawi I. Sittas G. "Silicon defects in diamond", Phys. Rev. B 1995, 51:16681
15. L. Hudec, P. Macháč, "Edge Effects on Contact Resistance Measurement by Transmission Line Model Method", Elektrotechnický časopis, vol. 44, Nr.2, 1993, pp: 41-43,
16. Werner M. Gluche P. Adamschik M. Kohn E. Fecht H.-J. "Review on diamond based piezoresistive sensors", Industrial Electronics, 1998, 1:147-152
17. A. L. Window, "Strain Gauge Technology", Springer, 1992
18. S. Sahli and D. M. Aslam, "Ultra-high sensitivity intra-grain polydiamond piezoresistors", Sensors and Actuators a-Physical, vol. 71, 1998, pp. 193-197
19. M. Aslam, I. Taher, A. Masood, M. A. Tamor and T. J. Potter, "Piezoresistivity in Vapor-Deposited Diamond Films", Applied Physics Letters, vol. 60, 1992, pp. 2923-2925