Linear microbolometric array based on VO x thin film

Journal of Infrared, Millimeter, and Terahertz Waves

Volumn 31, Issue 5, 2010, Pages 566-573

  Chen, Xi Qu ^a  

^a WUHAN POLYTECHNIC UNIVERSITY   (China)

Author keywords

Linear array; Microbolometer; VO x thin film

Indexed keywords

CMOS CIRCUITS; INFRARED IMAGES; INFRARED RESPONSE; LINEAR ARRAYS; MICROBOLOMETER; MICROMACHINING TECHNOLOGIES; RESPONSIVITY; TESTING RESULTS; THERMO SENSITIVE;

ARRAY PROCESSING; BOLOMETERS; INFRARED IMAGING; INFRARED SPECTROSCOPY; TEMPERATURE SENSORS; THIN FILMS;

THIN FILM DEVICES;

EID: 77949874781     PISSN: 18666892     EISSN: 18666906     Source Type: Journal    
DOI: 10.1007/s10762-010-9618-z     Document Type: Article

References (7)

1. 2 thin films J. App. Phys. 66 12 5844 10.1063/1.343605
2. 2-based infrared microbolometer array Int. J. Infrared Millimet. Waves 23 12 1699 10.1023/A:1021450317818
3. FJ Morin 1959 Oxides which show a metal-to-insulator transition at the Neel temperature Phys. Rev. Lett. 3 34 10.1103/PhysRevLett.3.34
4. 2-based microbolometer uncooled infrared focal plane arrays with CMOS readout integrated circuit," Proc. SPIE 6022, 602032-1 (2005).
5. x thermal IR detectors J. Infrared Millimet. Waves 23 2 99
6. 2-based uncooled bolometric detector arrays with integrated CMOS readout electronics Proc. SPIE 2882 11
7. x microbolometer FPAs Proc. SPIE 5074 402 10.1117/12.487657