Nanotribological properties of silicon nano-pillars coated by a Z-DOL lubricating film

Journal of Mechanical Science and Technology

Volumn 24, Issue 1, 2010, Pages 59-65

  Pham, Duc Cuong ^a,b   Na, Kyunghwan ^a   Yang, Sungwook ^a   Kim, Jinseok ^a   Yoon, Eui Sung ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

Author keywords

Adhesion; AFM; Friction; Micro Nano; Surface modification; Z DOL

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; COMBINED EFFECT; DIP COATING TECHNIQUES; FRICTION FORCE; LOW SURFACE ENERGY; LUBRICATING FILMS; MICRO/NANO; MINIATURIZED DEVICES; MODIFIED SURFACES; NANOTRIBOLOGICAL PROPERTIES; PERFLUOROPOLYETHERS; REAL AREA OF CONTACT; SI SURFACES; SI(1 0 0); SURFACE MODIFICATION; THERMAL TREATMENT; TOPOGRAPHICAL MODIFICATIONS;

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; LUBRICATING OILS; LUBRICATION; NANOTRIBOLOGY; REACTIVE ION ETCHING; SILICON; SILICON WAFERS; SURFACE CHEMISTRY; SURFACE TENSION; SURFACE TREATMENT; WEAR RESISTANCE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77949599770     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12206-009-1128-3     Document Type: Article

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