SCOPUS 정보 검색 플랫폼

Journal of Materials Science: Materials in Electronics

Volumn 21, Issue 1, 2010, Pages 33-37

Microstructure and properties of Al-doped ZnO thin films by nonreactive DC magnetron sputtering at room temperature following rapid thermal annealing

(4) Wang, Hua a Xu, Jiwen a Ren, Mingfang a Yang, Ling a

a GUILIN UNIVERSITY OF ELECTRONIC TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

AL CONTENT; AL-DOPED ZNO; AL-DOPING; ANNEALING TEMPERATURES; AZO FILMS; AZO THIN FILMS; DC MAGNETRON SPUTTERING; ELECTRICAL RESISTIVITY; GRAIN SIZE; MICROSTRUCTURE AND PROPERTIES; OPTICAL TRANSMITTANCE; OPTICAL TRANSPORT PROPERTIES; ROOM TEMPERATURE; SPUTTERING POWER;

DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; MAGNETRONS; MICROSTRUCTURE; OPTICAL FILMS; OPTICAL PROPERTIES; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; THIN FILMS; TRANSPORT PROPERTIES; ZINC OXIDE;

ALUMINUM;

EID: 77949425005 PISSN: 09574522 EISSN: 1573482X Source Type: Journal
DOI: 10.1007/s10854-009-9865-8 Document Type: Article

Times cited : (12)

References (10)

1
- 18144407652
- doi:10.1007/s11664-0050117-2
- R. Khanna, K. Ip, K. Allums, K. Baik, C. Abernathy, S. Pearton, Y. Heo, D. Norton, F. Ren, S. Shojah-Ardalan, R. Wilkins, J. Electron. Mater. 34, 395 (2005). doi:10.1007/s11664-0050117-2
- (2005) J. Electron. Mater. , vol.34 , pp. 395
- Khanna, R.¹ Ip, K.² Allums, K.³ Baik, K.⁴ Abernathy, C.⁵ Pearton, S.⁶ Heo, Y.⁷ Norton, D.⁸ Ren, F.⁹ Shojah-Ardalan, S.¹⁰ Wilkins, R.¹¹

2
- 18244431984
- doi: 10.1016/S0040-6090(02)00655-7
- T. Yamamoto, Thin Solid Films. 420-421, 100 (2002). doi: 10.1016/S0040-6090(02)00655-7
- (2002) Thin Solid Films. , vol.420-421 , pp. 100
- Yamamoto, T.¹

3
- 50349099424
- doi:10.1007/s10854-007-9489-9
- H. Wang, J.W. Xu, M.F. Ren, L. Yang, J. Mater. Sci.: Mater. Electron. 19, 1135 (2008). doi:10.1007/s10854-007-9489-9
- (2008) J. Mater. Sci. Mater. Electron. , vol.19 , pp. 1135
- Wang, H.¹ Xu, J.W.² Ren, M.F.³ Yang, L.⁴

4
- 0036494901
- doi: 10.1016/S0257-8972(01)01609-7
- A. Martín, J.P. Espinós, A. Justo, J.P. Holgado, F. Yubero, A.R.G. Elipe, Surf. Coat. Tech. 151-152, 289 (2002). doi: 10.1016/S0257- 8972(01)01609-7
- (2002) Surf. Coat. Tech. , vol.151-152 , pp. 289
- Martín, A.¹ Espinós, J.P.² Justo, A.³ Holgado, J.P.⁴ Yubero, F.⁵ Elipe, A.R.G.⁶

5
- 0037011454
- doi:10.1016/S0040-6090(02)00658-2
- H. Kim, J.S. Horwitz, S.B. Qadri, D.B. Chrisey, Thin Solid Films 420-421, 107 (2002). doi:10.1016/S0040-6090(02)00658-2
- (2002) Thin Solid Films , vol.107 , pp. 420-421
- Kim, H.¹ Horwitz, J.S.² Qadri, S.B.³ Chrisey, D.B.⁴

6
- 84878768008
- doi:10.1116/1.1340659
- M.J. Alam, D.C. Cameron, J. Vac. Sci. Technol. A 19, 1642 (2001). doi:10.1116/1.1340659
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 1642
- Alam, M.J.¹ Cameron, D.C.²

7
- 0038286276
- doi:10.1016/ S0022-0248/(03)01035-1042
- R.J. Hong, X. Jiang, B. Szyszka, V. Sittinger, S.H. Xu, W. Werner, G. Heide, J. Cryst. Growth 253, 117 (2003). doi:10.1016/ S0022-0248(03)01035-1042
- (2003) J. Cryst. Growth , vol.253 , pp. 117
- Hong, R.J.¹ Jiang, X.² Szyszka, B.³ Sittinger, V.⁴ Xu, S.H.⁵ Werner, W.⁶ Heide, G.⁷

8
- 0037212065
- doi:10.1016/S0022-0248(02)02012-2
- G.J. Fang, D.J. Li, B.L. Yao, J. Cryst. Growth 247, 393 (2003). doi:10.1016/S0022-0248(02)02012-2
- (2003) J. Cryst. Growth , vol.247 , pp. 393
- Fang, G.J.¹ Li, D.J.² Yao, B.L.³

9
- 8144229832
- doi:10.1016/j.surfcoat.2004.03.009
- S.S. Lin, J.L. Huang, P. Sajgalik, Surf. Coat. Tech. 190, 39 (2005). doi:10.1016/j.surfcoat.2004.03.009
- (2005) Surf. Coat. Tech. , vol.190 , pp. 39
- Lin, S.S.¹ Huang, J.L.² Sajgalik, P.³

10
- 0030735113
- doi:10.1016/S0927-0248(96)00066-9
- M.A. Martinez, J. Herrero, M.T. Gutierrez, Sol. Energy Mater. Sol. Cells 45, 75 (1997). doi:10.1016/S0927-0248(96)00066-9
- (1997) Sol. Energy Mater. Sol. Cells , vol.45 , pp. 75
- Martinez, M.A.¹ Herrero, J.² Gutierrez, M.T.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.