A novel boundary-confined method for high numerical aperture microlens array fabrication

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Hsieh, Hsin Ta ^a   Su, Guo Dung John ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FILL FACTOR; HIGH NUMERICAL APERTURES; HIGH RESOLUTION; HIGH UNIFORMITY; MICRO-LENS; MICROLENS ARRAYS; PHOTORESIST LAYERS; THERMAL REFLOW PROCESS; THICK PHOTORESISTS;

CYLINDERS (SHAPES); OPTICAL INSTRUMENT LENSES; PHOTORESISTS; SURFACE TREATMENT;

MICROLENSES;

EID: 77749311366     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035023     Document Type: Article

References (12)

1. Shieh H-P D, Huang Y-P and Chien K-W 2005 Micro-optics for liquid crystal displays applications IEEE/OSA J. Disp. Technol. 1 62-76
2. Peng H, Ho Y L, Yu X-J, Wong M and Kwok H-S 2005 Coupling efficiency enhancement in organic light-emitting devices using microlens array-theory and experiment IEEE/OSA J. Disp. Technol. 1 278-82
3. Yoon G Y, Jitsuno T, Nakatsuka M and Nakai S 1996 Shack Hartmann wave-front measurement with a large f-number plastic microlens array Appl. Opt. 35 188-92
4. Baillie D A and Gendler J E 2004 Zero-space microlenses for CMOS image sensors: optical modeling and lithographic process development Proc. SPIE 5377 953-9
5. Toshiyoshi H, Su G-D J, LaCosse J and Wu M C 2003 A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process J. Lightwave Technol. 21 1700-8
6. Ottevaere H, Cox R, Herzig H P, Miyashita T, Naessens K, Taghizadeh M, Volkel R, Woo H J and Thienpont H 2006 Comparing glass and plastic refractive microlenses fabricated with different technologies J. Opt. A: Pure Appl. Opt. 8 407-29
7. Daly D, Stevens R F, Hutley M C and Davies N 1990 Manufacture of microlenses by melting photoresist Meas. Sci. Technol. 1 759-66
8. Yang H, Chao C-K, Wei M-K and Lin C-P 2004 High fill-factor microlens array mold insert fabrication using a thermal reflow process J. Micromech. Microeng. 14 1197-204
9. Hyun H N, Jeong L P, Jae S C and Jeong G L 2007 The optimization of zero-spaced microlenses for 2.2 νm pixel CMOS image sensor Proc. SPIE 6520 652034
10. Wei M-K, Su I L, Chen Y-J, Chang M, Lin H-Y and Wu T-C 2006 The influence of a microlens array on planar organic light-emitting devices J. Micromech. Microeng. 16 368-74
11. Kwon H, Yee Y, Jeong C-H, Nam H-J and Bu J-U 2008 A high-sag microlens array film with a full fill factor and its application to organic light emitting diodes J. Micromech. Microeng. 18 065003
12. Sinzinger S and Jahns J 2003 Microoptics (Weinheim: Wiley-VCH) chapter 5 pp 94-5