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Applied Physics Letters

Volumn 96, Issue 8, 2010, Pages

Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation

(6) Wang, X C a Zheng, H Y a Tan, C W a Wang, F b Yu, H Y b Pey, K L b

a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY (Singapore)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

248 NM EXCIMER LASER; ATOMIC FORCE MICROSCOPES; FLUENCES; LASER IRRADIATIONS; N-DOPED; NANOBUMP ARRAYS; NANOBUMPS; NEAR-FIELD; REGULAR ARRAY; SCANNING ELECTRON MICROSCOPE; SI WAFER; SI-BASED; SILICA MICROSPHERES; SILICON SUBSTRATES; SIMPLE APPROACH;

EXCIMER LASERS; GAS LASERS; IRRADIATION; LASER BEAM EFFECTS; MICROSCOPES; MONOLAYERS; PULSED LASER APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON; SILICON WAFERS;

CRYSTAL ATOMIC STRUCTURE;

EID: 77749292100 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3327513 Document Type: Article

Times cited : (23)

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