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International Journal of Advanced Manufacturing Technology
Volumn 46, Issue 9-12, 2010, Pages 845-862
A spiral scanning probe system for micro-aspheric surface profile measurement
Author keywords

Aspheric surface; Centering error; Contact type displacement sensor; Precision metrology; Profile measurement; Scanning probe measurement method; Spiral scanning
Indexed keywords

ASPHERIC SURFACES; CENTERING ERRORS; CONTACT TYPE; DISPLACEMENT SENSOR; PROFILE MEASUREMENT; SCANNING PROBE MEASUREMENTS; SPIRAL SCANNING;
EID: 77349118736     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-008-1812-y     Document Type: Article
Times cited : (22)
References (12)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.