Compact AFM system for rapid and large area surface topography measurement

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 27, Issue 5, 2006, Pages 525-530

  Ju, Bing Feng ^a   Gao, Wei ^a   Aoki, Jim ^a   Asai, Takemi ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Air spindle; Atomic force microscope; Linear stage; Sinusoidal grid surface; Surface topography

Indexed keywords

EID: 34547641578     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)