Development of a precision dual level stage system for the dimensional metrology of large range surface topography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6672, Issue , 2007, Pages

  Kim, Jong Ahn ^a   Kim, Jae Wan ^a   Eom, Tae Bong ^a   Kang, Chu Shik ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Dimensional metrology; Dual level stage; FPGA; Laser interferometer; PTFE; Surface topography

Indexed keywords

FIELD PROGRAMMABLE GATE ARRAYS (FPGA); INTERFEROMETERS; LASER INTERFEROMETRY; SEMICONDUCTOR MATERIALS; SURFACE ROUGHNESS;

DIMENSIONAL METROLOGY; DUAL LEVEL STAGE; LASER INTERFEROMETERS;

SURFACE MEASUREMENT;

EID: 42149189576     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.732617     Document Type: Conference Paper

References (9)

1. R. Leach, "Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV," Meas. Sci. Technol., Vol. 11, pp. 1162-1172, 2000.
2. R. Leach, D. Chetwynd, L. Blunt, J. Haycocks, P. Harris, K. Jackson, S. Oldfield and S. Reilly, "Recent advanced in traceable dimensional and force metrology in UK," Meas. Sci. Technol., Vol. 17, pp. 467-476, 2006.
3. G. Dai, F. Pohlenz, M. Xu, L. Koenders, H.-U. Danzebrink and G. Wilkening, "Accurate and traceable measurement of nano- and microstructures," Meas. Sci. Technol., Vol. 17, pp. 545-552, 2006.
4. G. Dai, F. Pohlenz, H.-U. Danzebrink, M. Xu, K. Hasche and G. Wilkening, "Metrological large range scanning probe microscope," Rev. Sci. Instrum., Vol. 75, No. 4, pp. 962-969, 2004.
5. J. Kramar, "Nanometre resolution metrology with the Molecular Measuring Machine," Meas. Sci. Technol., Vol. 16, pp. 2121-2128, 2005.
6. W. Häßler-Grohne and H. Bosse, "An electron optical metrology system for pattern placement measurements," Meas. Sci. Technol., Vol. 9, pp. 1120-1128, 1998.
7. F. Meli and R. Thalman, "Long-range AFM profiler used for accurate pitch measurements," Meas. Sci. Technol., Vol. 9, pp. 1087-1092, 1998.
8. I. Misumi, S. Gonda, T. Kurosawa and K. Takamasu, "Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope," Meas. Sci. Technol., Vol. 14, pp. 463-471, 2003.
9. J. Schneir, T. McWaid, J. Alexander and B. Wilfley, "Design of an atomic force microscope with interferometric position control," J. Vac. Sci. Technol. B Vol. 12, No. 6, pp. 3561-3566, 1994.