Measurements of two-dimensional gratings using a metrological atomic force microscope with uncertainty evaluation

International Journal of Precision Engineering and Manufacturing

Volumn 9, Issue 2, 2008, Pages 18-22

  Kim, Jong Ahn ^a   Kim, Jae Wan ^a   Kang, Chu Shik ^a   Eom, Tae Bong ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

2 D grating; Metrological atomic force microscope; Nanometrology; Uncertainty analysis

Indexed keywords

EID: 43449093443     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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