An MWCNT-doped SNO2 thin film NO2 gas sensor by RF reactive magnetron sputtering

Journal of Semiconductors

Volumn 31, Issue 2, 2010, Pages

  Wei, Lin ^a   Shizhen, Huang ^a   Wenzhe, Chen ^a  

^a FUZHOU UNIVERSITY   (China)

Author keywords

Multi walled carbon nanotube; NO2 sensor; RF reactive magnetron sputtering; SnO2

Indexed keywords

GAS CONCENTRATION; GAS SENSING; GAS SENSING PROPERTIES; GAS SENSORS; HIGH SENSITIVITY; LOW CONCENTRATIONS; NO2 SENSORS; OPERATING TEMPERATURE; P-TYPE; PARTS PER BILLION; RADIO FREQUENCIES; REACTIVE MAGNETRON SPUTTERING; RESPONSE-RECOVERY TIME; RF REACTIVE MAGNETRON SPUTTERING; SEM; THERMAL TREATMENT; THIN FILM SENSORS;

CARBON NANOTUBES; CHEMICAL SENSORS; GAS DETECTORS; GASES; HEAT TREATMENT; MAGNETRON SPUTTERING; MAGNETRONS; NITROGEN COMPOUNDS; SCANNING ELECTRON MICROSCOPY; THIN FILM DEVICES; THIN FILMS; TIN; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTIWALLED CARBON NANOTUBES (MWCN);

EID: 77149159094     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/31/2/024006     Document Type: Article

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