A novel semiconductor NO gas sensor operating at room temperature

Sensors and Actuators, B: Chemical

Volumn 49, Issue 1-2, 1998, Pages 58-62

  Zhang, Wenyi ^a   Uchida, H ^a   Katsube, T ^a   Nakatsubo, T ^b   Nishioka, Y ^c  

^a SAITAMA UNIVERSITY   (Japan)

^b TEXAS INSTRUMENTS   (United States)

^c Texas Instruments Japan Ltd   (Japan)

Author keywords

NO gas sensor; Room temperature gas sensor; Si based gas sensor; WO3 thin film

Indexed keywords

ANNEALING; CRYSTALLIZATION; ELECTRIC CURRENT MEASUREMENT; ELECTRODES; NITROGEN OXIDES; OHMIC CONTACTS; SEMICONDUCTOR DIODES; SILICON SENSORS; SPUTTER DEPOSITION; THIN FILMS;

INTEGRATED SENSORS; ROOM TEMPERATURE GAS SENSOR; SEMICONDUCTOR GAS SENSOR;

CHEMICAL SENSORS;

EID: 0032090656     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00129-4     Document Type: Article

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