Interfacial thermal resistance of Au/SiO2 produced by sputtering method

High Temperatures - High Pressures

Volumn 37, Issue 1, 2008, Pages 31-39

  Xu, Yibin ^a   Goto, Masahiro ^a   Tanaka, Yoshihisa ^a   Tanaka, Miyoko ^a   Shimono, Masato ^a   Yamazaki, Masayoshi ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

2 method; Acoustic mismatch model; Au SiO2 interface; Diffusion mismatch model; Interfacial thermal resistance; Sputter; Thin film

Indexed keywords

EID: 77149157073     PISSN: 00181544     EISSN: 14723441     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (15)

1. Swartz E. T. and Pohl R. O. Rev. Mod. Phys. 61 (1989), 605.
2. Cheeke J. D. N., Ettinger H. and Hebral B. Can. J. Phys. 54 (1976), 1749.
3. Stoner R. J. and Maris H. J. Phys. Rev. B. 48 (1993), 16373.
4. Swartz E. T. and Pohl R. O. Appl. Phys. Lett. 51 (1987), 2200.
5. Cahill D. G., Gord W. K., Goodson K. E., Mahan G. D., Majumdar A., Maris H. J., Merlin R. and Phillpot S. R. J. Appl. Phys. 93 (2003), 793.
6. Xu Y.,Wang H., Tanaka Y., Shimono M. and Yamazaki M. Mater Trans. 48 (2007), 148.
7. Goto M., Kasahara A. and Tosa M. Appl. Surf. Sci. 252 (2006), 2482.
8. Goto M., Kasahara A. and Tosa M. Vacuum. 80 (2006), 740.
9. Cahill D. Rev. Sci. Instrum. 75 (2004), 5119.
10. Aoyama H.,Yagi T., Taketoshi N., Baba T.,Miyamura A., SatoY. and ShigesatoY. Proceedings of the Asian Thermophysical Properties Conference. 21-24 August, 2007, Fukuoka, Japan. Paper No. 116. Au/SiO2 Thermal Resistance 39
11. Kato R. and Hatta I. Int. J. Thermophys. 26 (2005), 179.
12. Japan Society of Thermophysical Properties. Thermophysical Properties Handbook. Tokyo, Yokendo, 1993.
13. National Institute for Materials Science. (2007). Basic Database for Crystal Structure: Pauling File. Retrieved on 14 Sep. 2007, from http://crystdb.nims.go.jp/.
14. Subramanian S. and Yip S. Comp. Mater. Sci. 23 (2002), 116.
15. Lide D. R. CRC Handbook of Chemistry and Physics (71st Edition). Cleveland, OH: CRC Press Inc, 1990-1991.