Frictional property with preferred crystal orientation of platinum oxide and palladium oxide coatings synthesized by combinatorial sputter coating system

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 740-743

  Goto, Masahiro ^a   Kasahara, Akira ^a   Tosa, Masahito ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Combinatorial sputter coating; Friction; Palladium oxide; Platinum oxide; Thin film

Indexed keywords

COATINGS; CRYSTAL STRUCTURE; FRICTION; MAGNETRON SPUTTERING; PARTIAL PRESSURE; PLATINUM COMPOUNDS; THIN FILMS; X RAY DIFFRACTION;

COMBINATORIAL SPUTTER COATING; PALLADIUM OXIDE; PLATINUM OXIDE;

CRYSTAL ORIENTATION;

EID: 33646587721     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.038     Document Type: Article

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