Micro-pressure sensor made of conductive PDMS for microfluidic applications

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1266-1269

  Li, H ^a   Luo, C X ^a   Ji, H ^a   Ouyang, Qi ^a   Chen, Y ^a,b  

^a PEKING UNIVERSITY   (China)

^b ECOLE NORMALE SUPÉRIEURE   (France)

Author keywords

Conductive PDMS; Microfluidics; Pressure sensor

Indexed keywords

MICROCHANNELS; POLYDIMETHYLSILOXANE; POWDER METALS; PRESSURE SENSORS; SILICONES;

FABRICATION AND CHARACTERIZATIONS; FABRICATION PROCESS; INTEGRATION REQUIREMENTS; MICRO FLUIDIC APPLICATIONS; MICRO PRESSURE SENSORS; MICRO-FLUIDIC DEVICES; PIEZORESISTIVE EFFECTS; POLYDIMETHYLSILOXANE PDMS;

MICROFLUIDICS;

EID: 76949103009     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.005     Document Type: Article

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