A microfluidic MEMS sensor for the measurement of density and viscosity at high pressure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6465, Issue , 2007, Pages

  Harrison, Christopher ^a   Fornari, Antoine ^a   Chen, Hua ^a   Ryu, Seungoh ^a   Goodwin, Anthony ^b   Hsu, Kai ^b   Marty, Frederic ^c   Mercier, Bruno ^c  

^a SCHLUMBERGER DOLL RESEARCH   (United States)

^b SCHLUMBERGER   (United States)

^c Ecole Superieure d'Ingenieurs en Electrotechnique et Electronique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FLUID DENSITY; MICROFLUIDIC CHANNEL;

ELECTRONICS PACKAGING; HYDROCARBONS; MICROFLUIDICS; PRESSURE SENSORS; VISCOSITY;

MEMS;

EID: 34247362128     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.698976     Document Type: Conference Paper

References (5)

1. Oden, P.I.; Chen, G. Y.; Steele, R. A.; Warmack, R. J.; Thundat, T. Appl. Phys. Lett. 1996, 68, 3814.
2. Walters, D. A.; Cleveland, J.P.; Thomson, N. H.; Hansma, P.K.; Wendman, M.A.; Gurley, G.; Elings, V. Rev. Sci. Instrum. 1996, 67, 3583.
3. Ahmed, N.; Nino, D. F.; Moy, V.T. Rev. Sci. Instrum. 2001, 72, 2731.
4. Mehl, J.B. J. Acoust. Soc. Am. 1978, 64, 1523.
5. Ewing, M. B.; Trusler, J. J. Acoust. Soc. Am. 1989, 55, 1780.