Inverted tapered pillars for mass sensing

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 730-733

  Melli, Mauro ^a,b   Pozzato, Alessandro ^a   Lazzarino, Marco ^a  

^a LABORATORIO TASC   (Italy)

^b SISSA   (Italy)

Author keywords

Mass sensor; MEMS; Pillars; Resonators; SAM

Indexed keywords

A-DENSITY; ADSORBED MOLECULES; DRY ENVIRONMENT; FUNCTIONALIZATIONS; HIGH SENSITIVITY; MASS DETECTION; MASS SENSING; MASS SENSOR; MICRO AND NANO RESONATORS; MICRO RESONATORS; MICRO-PILLARS; ORGANIC MOLECULES; REDUCED SENSITIVITY; REPRODUCIBILITIES; SELECTIVE ADSORPTION; SELF-CALIBRATING; SENSOR DENSITY; SPECIAL CLASS;

ADSORPTION; MEMS; MICROELECTROMECHANICAL DEVICES; MOLECULES; MONOLAYERS; POLLUTION DETECTION; RESONATORS; STRATEGIC PLANNING;

SENSORS;

EID: 76949088389     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.021     Document Type: Article

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