Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 708-711

  Bosco, F G ^a   Hwu, E T ^b   Keller, S ^a   Greve, A ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Cantilever based sensing; Chip holder; DVD pickup head; Microfabrication; SU 8

Indexed keywords

CHIP HOLDER; DVD PICK-UP HEAD; DVD-ROM; LIQUID ENVIRONMENT; PICK-UP HEAD; POLYMER CANTILEVERS; POLYMER SUBSTRATE; POLYMERIC MATERIAL; PORTABLE DEVICE; RESONANT FREQUENCIES; SELF-ALIGNED; SENSING CHIP;

ATOMIC FORCE MICROSCOPY; DATA STORAGE EQUIPMENT; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NANOCANTILEVERS; NATURAL FREQUENCIES; VIDEODISKS;

PHOTORESISTS;

EID: 76949083991     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.064     Document Type: Article

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