Theoretical and experimental analysis of material deformation by microcontact

International Journal of Precision Engineering and Manufacturing

Volumn 10, Issue 2, 2009, Pages 111-116

  Ryu, Rae Hyeong ^a   Lim, Si Hyung ^a   Jeong, Jay I ^a   Shin, Donghoon ^a   Jang, Siyoul ^a   Yim, Hong Jae ^a   Lee, Kee Sung ^a  

^a Kookmin University   (South Korea)

Author keywords

Contact damage; Fem; Imprint; Mold; Nano; Substrate

Indexed keywords

EID: 76849114914     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0035-y     Document Type: Article

References (17)

1. Lan, H., Ding, Y., Liu, H. and Lu, B., Review of the water stagefornanoimprint lithography,Microelectronic Engineering, Vol. 84, No. 4, pp. 684-688, 2007.
2. Hsueh, C., Lee, S., Lin, H., Chen, L. and Wang, W., Analyses of mechanical failure in nanoimprint processes, Materials Science and Engineering A, Vol. 433, No. 1-2, pp. 316-322, 2006.
3. Chou, S. Y., Krauss, P. R. and Renstrom, P. J., Imprint lithography with 25 nanometer resolution, Science, Vol. 272, No. 5258, pp. 85-87, 1996.
4. Schueller, O. J. A., Brittain, S. T. and Whitesides, G. M., Fabrication of glassy carbon microstructures by soft lithography, Sensors and Actuators A: Physical, Vol. 72, No. 2, pp. 125-139, 1999.
5. Choi, B. J., Sreenivasan, S. V., Johnson, S., Colburn, M. and Wilson, C. G., Design of orientation stages for step and flash imprint lithography, Journal of the International Societies for Precision Engineering and Nanotechnology, Vol. 25, No. 3, pp. 192-199, 2001.
6. Lawn, B. R., Indentation of Ceramic with Spheres: A Century After Hertz, Journal of the American Ceramic Society, Vol. 81, No. 8, pp. 1977-1994, 1998.
7. Lawn, B. R., Lee, K. S., Chai, H., Pajares, A., Kim, D. K., Wuttiphan, S., Peterson, I. M. and Hu, X., Damage-Resistant Brittle Coatings, Advanced Engineering Materials, Vol. 11, pp. 745-748, 2000.
8. Lee, K. S., Jung, Y. G., Peterson, I. M., Lawn, B. R., Kim, D. K. and Lee, S. K., Model for Cyclic Fatigue of Quasi-Plastic Ceramics in Contact with Spheres, Journal of the American Ceramic Society, Vol. 83, No. 9, pp. 2255-2262, 2000.
9. Lee, K. S., Effect of Elastic/Plastic Mismatch on the Contact Crack Initiation in Hard Ceramic Coating Layer, KSME International Journal, Vol. 17, No. 12, pp. 1938-1947, 2003.
10. Lee, K. S., Damage Tolerance in Hardly Coated Layer Structure with Modes Elastic Modulus Mismatch, KSME International Journal, Vol. 17, No. 11, pp. 1638-1649, 2003.
11. Ha, Y. S., Jang, C. D., Kim, J. T. and Mun, H. S., Analysis of Post-Weld Deformation at the Heat-Affected Zone Using External Forces Based on the Inherent Strain, International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 56-62, 2007.
12. Alagumurthi, N., Palaniradja, K. and Soundararajan, V., Cylindrical Grinding - A Review on Surface Integrity, International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 3, pp. 24-44, 2007.
13. Fujii, Y., The Levitation Mass Method: A Precision Mass and Force Measurement Technique, International Journal of Precision Engineering and Manufacturing, Vol. 9, No. 3, pp. 46-50, 2008.
14. Cai, H., Kalceff, S. M. A. and Lawn, B. R., Deformation and fracture of mica-containing glass-ceramics in Hertzian contacts, J. Master. Res., Vol. 9, No. 3, pp. 762-770, 1994.
15. Lee, S. M., Kim, T. W., Yim, H. J., Kim, C., Kim, Y. W. and Lee, K. S., Mechanical Properties and Contact Damages of Nanostructured Silicon Carbide Ceramics, Journal of the Ceramic Society of Japan, Vol. 115, No. 5, pp. 304-309, 2007.
16. Jung, Y. G., Lee, S. Y. and Choi, S. C., Contact fatigue and strength degradation in dental ceramics, Journal of Korean Association of Crystal Growth, Vol. 9, No. 5, pp. 527-533, 1999.
17. Lawn, B. R., Padture, N. P., Cai, H. and Guiberteau, F., Making Ceramics 'Ductile', The American Association for the Advancement of Science, Vol. 263, No. 5150, pp. 1114-1116, 1994.