Laser Desorption/Ionization Fourier Transform Mass Spectrometry of Thin Films Deposited on Silicon by Plasma Polymerization of Acetylene

Journal of the American Society for Mass Spectrometry

Volumn 21, Issue 3, 2010, Pages 411-420

  Miladinović, Saša M ^a   De Vriendt, Valérie ^b   Robotham, Scott A ^a,c   Maseri, Fabrizio ^d   Lucas, Stéphane ^b   Wilkins, Charles L ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

^b UNIVERSITY OF NAMUR   (Belgium)

^c NEBRASKA WESLEYAN UNIVERSITY   (United States)

^d ARCELORMITTAL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE GAS; BIPOLAR DISCHARGE; FOURIER TRANSFORM MASS SPECTROMETRY; HIGH-RESOLUTION MASS SPECTRUM; HYDROGEN GAS; LASER DESORPTION/IONIZATION; MOLECULAR SPECIES; POSITIVE ION MODE; QUADRUPOLE MASS; RELATIVE ABUNDANCE; SEM; SILICON SUBSTRATES; SMOOTH SURFACE;

ACETYLENE; AROMATIC HYDROCARBONS; CARBON CLUSTERS; CARBON FILMS; DESORPTION; ELECTRIC DISCHARGES; LIGHTING; MASS SPECTROMETERS; MASS SPECTROMETRY; OLIGOMERS; OPTICAL SENSORS; ORGANIC COMPOUNDS; PLASMA DEPOSITION; PLASMA POLYMERIZATION; PLASMAS; POLYCYCLIC AROMATIC HYDROCARBONS; REACTION KINETICS; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS;

FOURIER TRANSFORMS;

ACETYLENE; CARBON; HYDROCARBON; HYDROGEN; SILICON;

ARTICLE; FOURIER TRANSFORM MASS SPECTROMETRY; MATRIX ASSISTED LASER DESORPTION IONIZATION TIME OF FLIGHT MASS SPECTROMETRY; OLIGOMERIZATION; OPTICAL RESOLUTION; PLASMA; POLYMERIZATION; QUADRUPOLE MASS SPECTROMETRY; SIGNAL DETECTION; THIN LAYER CHROMATOGRAPHY;

EID: 76749128948     PISSN: 10440305     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jasms.2009.11.005     Document Type: Article

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