A simple method for the compensation of the nonlinearity in the heterodyne interferometer

Measurement Science and Technology

Volumn 13, Issue 2, 2002, Pages 222-225

  Eom, TaeBong ^a   Choi, TaeYoung ^b   Lee, KeonHee ^b   Choi, HyunSeung ^c   Lee, SunKyu ^c  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Chungnam National University   (South Korea)

^c Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Calibration; Displacement; Dynamic correction; Laser interferometer; Nonlinearity

Indexed keywords

HELIUM NEON LASERS; HETERODYNING; LIGHT AMPLIFIERS; NATURAL FREQUENCIES; PHASE MEASUREMENT;

HETERODYNE LASER INTERFEROMETERS;

INTERFEROMETERS;

CALIBRATION; INTERFEROMETRY; LASER MEASUREMENT; NON-LINEAR SYSTEM;

EID: 0036471396     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/13/2/313     Document Type: Article

References (11)

1. Nonlinearity in interferometric measurements
2. Nonlinearity in the length measurement using heterodyne laser Michelson interferometry
3. Investigation and compensation of the nonlinearity of heterodyne interferometers
4. Reduction of systematic errors in heterodyne interferometric displacement measurement
5. Linear interpolation of periodic error in a heterodyne laser interferometer at sub nanometer levels
6. Heterodyne interferometer with subatomic periodic nonlinearity
7. Michelson interferometery with 10 pm accuracy
8. Optical sources of nonlinearity in heterodyne interferometers
9. Nonlinearity in measurements of length by optical interferometry
10. A proposed design for a polarization-insensitive optical interferometer system with subnanometric capability
11. Problems regarding linearity of a laser interferometer with a single-frequency laser