Tribochemical reactions of Si incorporated diamond-like carbon films during the initial transient period

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 177-182

  Kim, Myoung Geun ^a   Lee, Kwang Ryeol ^a   Eun, Kwang Yong ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BENZENE; CARBON; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SEMICONDUCTING DIAMONDS; SEMICONDUCTING SILICON; SILANES; TRIBOLOGY; WEAR RESISTANCE;

DIAMOND-LIKE CARBON; TRIBOCHEMICAL REACTION;

SEMICONDUCTING FILMS;

EID: 0031389097     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-498-177     Document Type: Conference Paper

References (14)