Amorphous-like nanocrystalline γ-Al2O3 films prepared by MOCVD

Surface and Coatings Technology

Volumn 204, Issue 14, 2010, Pages 2170-2174

  Ito, Akihiko ^a   Tu, Rong ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Alumina; Coating; Microstructure; MOCVD

Indexed keywords

ACETYLACETONATES; ALUMINA COATING; AMORPHOUS STRUCTURES; AMORPHOUS-LIKE; CHAMBER PRESSURE; DEPOSITION CONDITIONS; METALORGANIC CHEMICAL VAPOR DEPOSITION; MOCVD; NANOCRYSTALLINES; SUBSTRATE TEMPERATURE; TEM OBSERVATIONS; TRACE AMOUNTS;

ALUMINUM; ALUMINUM COATINGS; AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; COATINGS; DIFFRACTION; HOLOGRAPHIC INTERFEROMETRY; MICROSTRUCTURE;

FILM PREPARATION;

EID: 76349085173     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.11.043     Document Type: Article

References (19)

1. Nie X., Meletis E.I., Jiang J.C., Leyland A., Yerokhin A.L., and Matthews A. Surf. Coat. Technol. 149 (2002) 245
2. Tabersky R., van den Berg H., and König U. Int. J. Refract. Met. Hard Mater. 14 (1996) 79
3. Wefers K., and Misra C. Oxides and Hydroxides of Aluminium (1987), Alcoa Laboratories
4. Santos P.S., Santos H.S., and Toledo S.P. Mater. Res. 3 (2000) 104
5. Ruppi S. Int. J. Refract. Met. Hard Mater. 23 (2005) 306
6. Vuorinen S., and Karlsson L. Thin Solid Films 214 (1992) 132
7. Park C., Kim J., Chun J.S., and Vac J. Sci. Technol. A 1 (1983) 1820
8. Fink M., Laimer J., Störi H., and Mitterer C. Surf. Coat. Technol. 200 (2005) 360
9. Pradhan S.K., Reucroft P.J., and Ko Y. Surf. Coat. Technol. 176 (2004) 382
10. Larsson A., and Ruppi S. Int. J. Refract. Met. Hard Mater. 19 (2001) 515
11. Maruyama T., and Arai S. Appl. Phys. Lett. 60 (1992) 322
12. Zywitzki O., and Hoetzsch G. Surf. Coat. Technol. 86-87 (1996) 640
13. Pflitsch C., Viefhaus D., Bergmann U., and Atakan B. Thin Solid Films 515 (2007) 3653
14. Pflitsch C., Viefhaus D., and Atakan B. Chem. Vap. Deposition 13 (2007) 420
15. Tu R., Kimura T., and Goto T. Mater. Trans. 43 (2002) 2354
16. Sohlberg K., Pennycook S.J., and Pantelides S.T. J. Am. Chem. Soc. 121 (1999) 7493
17. Zhou R.S., and Snyder R.L. Acta Crystallogr B 47 (1991) 617
18. Maruyama T., and Nakai T. Appl. Phys. Lett. 58 (1991) 2079
19. Devi A., Shivashankar S., and Samuelson A. J. Phys. IV France 12 (2002) Pr4- 139