Molecular dynamics simulation of silicon oxidization

Thin Solid Films

Volumn 518, Issue 9, 2010, Pages 2422-2426

  Ganster, Patrick ^a   Tréglia, Guy ^a   Lancon, Frédéric ^b   Pochet, Pascal ^b  

^a CNRS   (France)

^b CEA GRENOBLE   (France)

Author keywords

Molecular dynamics; Silicon oxidization

Indexed keywords

EXPERIMENTAL OBSERVATION; HIGH TEMPERATURE; LAYER-BY-LAYERS; MOLECULAR DYNAMICS SIMULATIONS; OXIDIZATION; OXYGEN ATOM; RANDOM NETWORK; SI ATOMS; SI-SI BONDS;

DENDRIMERS; DYNAMICS; MOLECULAR DYNAMICS; MOLECULAR OXYGEN; SILICON; SILICON COMPOUNDS;

SILICON OXIDES;

EID: 76149104291     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.144     Document Type: Article

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