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Volumn 156-158, Issue , 2009, Pages 387-393

Study of internal versus external gettering of iron during slow cooling processes for silicon solar cell fabrication

Author keywords

Multi crystalline silicon; Phosphorous diffusion gettering; Slow cooling

Indexed keywords

COOLING; CRYSTALLINE MATERIALS; DEFECTS; DIFFUSION; PHOSPHORUS; SEGREGATION (METALLOGRAPHY); SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; IRON;

EID: 75849126210     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.156-158.387     Document Type: Conference Paper
Times cited : (15)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.