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Volumn 156-158, Issue , 2009, Pages 387-393
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Study of internal versus external gettering of iron during slow cooling processes for silicon solar cell fabrication
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Author keywords
Multi crystalline silicon; Phosphorous diffusion gettering; Slow cooling
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Indexed keywords
COOLING;
CRYSTALLINE MATERIALS;
DEFECTS;
DIFFUSION;
PHOSPHORUS;
SEGREGATION (METALLOGRAPHY);
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON WAFERS;
IRON;
ELECTRON LIFETIME;
GETTERING;
HIGH TEMPERATURE TREATMENTS;
INTERNAL GETTERING;
INTERSTITIAL IRON;
METAL IMPURITIES;
MULTI-CRYSTALLINE SILICON;
P-TYPE;
PHOSPHOROUS DIFFUSION GETTERING;
RELAXATION GETTERING;
SEGREGATION GETTERING;
SI WAFER;
SLOW COOLING;
SOLAR CELL FABRICATION;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON SOLAR CELLS;
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EID: 75849126210
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/SSP.156-158.387 Document Type: Conference Paper |
Times cited : (15)
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References (14)
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