Calculating time-of-flight spectra of post-ionized sputtered neutrals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 1051-1057

  Veryovkin, Igor V ^a   Calaway, Wallis F ^a   Pellin, Michael J ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Computer modeling and simulation; Ion surface impact; Sputtering by atom, molecule and ion impact; Time of flight mass spectrometers

Indexed keywords

CASCADE CONTROL SYSTEMS; COMPUTER SIMULATION; DENSITY (OPTICAL); LASER BEAM EFFECTS; MASS SPECTROMETRY; PHOTOIONIZATION; POSITIVE IONS; SPECTRUM ANALYSIS; SPUTTERING; VELOCITY MEASUREMENT;

COMPUTER MODELING AND SIMULATION; ION-SURFACE IMPACT; MOLECULE AND ION IMPACT; SPUTTERING BY ATOM; TIME-OF-FLIGHT MASS SPECTROMETERS;

ATOMIC PHYSICS;

EID: 2342488037     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.211     Document Type: Conference Paper

References (16)

1. Pellin M.J., Calaway W.F., Veryovkin I.V. Vickerman J., Briggs D. ToF-SIMS: Surface Analysis by Mass Spectrometry. 2001;375 Surface Spectra Ltd. and IM Publications.
2. Arlinghaus H.F., Calaway W.F., Young C.E., Pellin M.J., Gruen D.M., Chase L.L. J. Appl. Phys. 65(1):1989;281.
3. Wucher A. Vickerman J., Briggs D. ToF-SIMS: Surface Analysis by Mass Spectrometry. 2001;347 Surface Spectra Ltd. and IM Publications.
4. Higashi Y., Maruo T. Int. J. Mass Spectrom. Ion Proc. 164:1997;163.
5. Higashi Y. Spectrochim. Acta B. 54:1999;109.
6. Sigmund P. Behrish R. Sputtering by Particle Bombardment I. 1981;9 Springer, Berlin.
7. Sigmund P. Phys. Rev. 184:1969;383.
8. Thompson M.W. Philos. Mag. 18:1968;377.
9. Betz G., Wien K. Int. J. Mass Spectrom. Ion Proc. 140:1994;1.
10. Husinsky W., Betz G. Thin Solid Films. 272(2):1996;289.
11. Matsunami N., Yamamura Y., Itikawa Y., Itoh N., Kazumata Y., Miyagawa S., Morita K., Shimizu R., Tawara H. At. Data Nucl. Data Tables. 31:1984;1.
12. Pellin M.J., Young C.E., Calaway W.F., Burnett J.W., Jorgensen B., Schweitzer E.L., Gruen D.M. Nucl. Instr. and Meth. B. 18:1987;446.
13. I.V. Veryovkin, W.F. Calaway, M.J. Pellin, in: Secondary Ion Mass Spectrometry, SIMS XII, Proceedings of the 12th International Conference, Elsevier, 2000, p. 337.
14. Veryovkin I.V., Calaway W.F., Pellin M.J. Nucl. Instr. and Meth. A. 519:2004;363.
15. D.A. Dahl, 43rd ASMS Conference on Mass Spectrometry and Allied Topics, 21-26 May 1995, Atlanta, Georgia, p. 717.
16. Dahl D.A. Int. J. Mass Spectrom. Ion Proc. 200:2000;3.